Wet Chemical Etching of AlN Single Crystals
نویسندگان
چکیده
منابع مشابه
The influence of the AlN film texture on the wet chemical etching
The influence of the aluminum nitride (AlN) film texture on the chemical etching in KOH solution was invested. The AlN films with the different texture and crystal quality were prepared by sputtering. It is found that the chemical etching behaviors, including the etch rate, the activation energy, the surface morphology and the anisotropy, are strongly dependent on the film texture. There is a f...
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ژورنال
عنوان ژورنال: MRS Internet Journal of Nitride Semiconductor Research
سال: 2002
ISSN: 1092-5783
DOI: 10.1557/s1092578300000302